Protuberance formation without plastic deformation by mechanical pre-processing can realize less damaged mask patterning. Additionally, areas at pre-processed low load and find more Scanning density were easily etched. This implies that the

various profiles obtained were possibly fabricated by the changing load and scanning density of the mechanical pre-processing and by additional KOH GDC-0068 research buy solution etching. With the removal of the natural oxide layer and formation of a mechanochemical oxide layer without plastic deformation, the etching depth can be controlled by changing the etching time. This therefore allows us to fabricate low-damage grooves of various depths. Acknowledgements This research was performed with the help of our graduate students at Nippon Institute of Technology. References 1. Drexler

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